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Книга Electroceramic-Based MEMS Nava Setter

Electroceramic-Based MEMS

Fabrication-Technology and Applications

Автор: Nava Setter
Език: Английски език
Корици: С твърди корици
Издател: Springer-Verlag New York Inc.
Наличност: Външен склад в ограничено количество
Изпращаме след 13-18 дни
230.01 € 449.86 лв
The book is focused on the use of functional oxide and nitride thin films to increase functionality...

Информация за книгата

Автор
Nava Setter
Език
Английски език
Корици
Книга - С твърди корици
Издадена
2005
страници
414
EAN
9780387233109
ISBN
0387233105
Enbook ID
01381066
Издател
Springer-Verlag New York Inc.
Теглоt
1710
Размери
155 x 235 x 33

Пълно описание

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics:§Part A: Applications and devices with electroceramic-based MEMS:§Chemical microsensors §Microactuators based on thin films §Micromachined ultrasonic transducers §Thick-film piezoelectric and magnetostrictive devices §Pyroelectric microsystems §RF bulk acoustic wave resonators and filters §High frequency tunable devices§MEMS for optical functionality §Part B: Materials, fabrication technology, and functionality:§Ceramic thick films for MEMS §Piezoelectric thin films for MEMS§Materials and technology in thin films for tunable high frequency devices §Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics §Microfabrication of piezoelectric MEMS §Nano patterning methods for electroceramics§Soft lithography emerging techniques §The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field.§The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

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