Книга High Dielectric Constant Materials Howard Huff

High Dielectric Constant Materials

VLSI MOSFET Applications

Автор: Howard Huff, David Gilmer
Език: Английски език
Корици: С твърди корици
Наличност: Външен склад в ограничено количество
Изпращаме след 13-18 дни
342.68 670.22 лв
Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving Int...

Информация за книгата

Език
Английски език
Корици
Книга - С твърди корици
Издадена
2004
страници
710
EAN
9783540210818
ISBN
3540210814
Enbook ID
05273715
Теглоt
2650
Размери
155 x 235 x 45

Пълно описание

Issues relating to the high-K gate dielectric are among the greatest challenges for the evolving International Technology Roadmap for Semiconductors (ITRS). More than just an historical overview, this book will assess previous and present approaches related to scaling the gate dielectric and their impact, along with the creative directions and forthcoming challenges that will define the future of gate dielectric scaling technology. Topics include: an extensive review of Moore's Law, the classical regime for SiO2 gate dielectrics; the transition to silicon oxynitride gate dielectrics; the transition to high-K gate dielectrics (including the drive towards equivalent oxide thickness in the single-digit nanometer regime); and future directions and issues for ultimate technology generation scaling. The vision, wisdom, and experience of the team of authors will make this book a timely, relevant, and interesting, resource focusing on fundamentals of the 45 nm Technology Generation and beyond.

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