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Книга MEMS Vibratory Gyroscopes Cenk Acar

MEMS Vibratory Gyroscopes

Structural Approaches to Improve Robustness

Автор: Cenk Acar, Andrei M. Shkel
Език: Английски език
Корици: С твърди корици
Издател: Springer-Verlag New York Inc.
Наличност: Външен склад
Изпращаме след 10-13 дни
189.34 € 370.31 лв
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational prin...

Информация за книгата

Автор
Cenk Acar, Andrei M. Shkel
Език
Английски език
Корици
Книга - С твърди корици
Издадена
2008
страници
260
EAN
9780387095356
ISBN
0387095357
Enbook ID
01380778
Издател
Springer-Verlag New York Inc.
Теглоt
540
Размери
163 x 244 x 19

Пълно описание

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

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