Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

Name: Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications
Brand: Springer, Berlin
SKU: 9789819661619
Price: 168.31 EUR
Availability: InStock

Автор: Kamaljeet Singh, Ayan Karmakar

Език:

Корици: С твърди корици

Издател: Springer, Berlin

Наличност: Външен склад

Изпращаме след 10-13 дни

168.31 € 329.19 лв

This book details simple methodology for the realization of the practical micro devices employed in...

Информация за книгата

Автор

Kamaljeet Singh, Ayan Karmakar

Език

Английски език

Корици

Книга - С твърди корици

Издадена

2025

страници

230

EAN

9789819661619

Enbook ID

48233588

Издател

Springer, Berlin

Теглоt

472

Размери

155 x 235

Пълно описание

This book details simple methodology for the realization of the practical micro devices employed in general applications. The book brings out practical concept along with process details associated with the device realization. The micro device fabrication technique is similar to MEMS and the application and methodologies are compatible to standard CMOS technologies. This book covers basic of wafer, general micro devices such as micro-heater, temperature sensor, humidity sensor, gas sensor, pyro-device along with associated characterization, integration and assembly aspects. This book provides basic overview and discusses practical aspects with characterization data. This book is targeted for the beginners and researchers providing insight into the practical aspects of this technology.

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Micro Electro Mechanical System (MEMS) Technology for Multifaceted Applications

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