Книга Nanopositioning Technologies CHANGHAI RU

Nanopositioning Technologies

Fundamentals and Applications

Автор: CHANGHAI RU
Език: Английски език
Корици: С меки корици
Наличност: Външен склад
Изпращаме след 5-8 дни
105.30 205.95 лв
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and ac...

Информация за книгата

Автор
Език
Английски език
Корици
Книга - С меки корици
Издадена
2018
страници
409
EAN
9783319795393
ISBN
9783319795393
Enbook ID
19308562
Теглоt
635
Размери
155 x 235 x 23

Пълно описание

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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