Nanopositioning Technologies

Name: Nanopositioning Technologies
Brand: Springer International Publishing AG
SKU: 9783319238524
Price: 105.41 EUR
Availability: InStock

Fundamentals and Applications

Автор: Changhai Ru, Xinyu Liu, Yu Sun

Език:

Корици: С твърди корици

Издател: Springer International Publishing AG

Наличност: Външен склад

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105.41 € 206.16 лв

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and ac...

Информация за книгата

Автор

Changhai Ru, Xinyu Liu, Yu Sun

Език

Английски език

Корици

Книга - С твърди корици

Издадена

2015

страници

409

EAN

9783319238524

ISBN

3319238523

Enbook ID

09493694

Издател

Springer International Publishing AG

Теглоt

966

Размери

155 x 235 x 29

Пълно описание

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

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Nanopositioning Technologies

Fundamentals and Applications

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