Polycrystalline Silicon for Integrated Circuit Applications

Name: Polycrystalline Silicon for Integrated Circuit Applications
Brand: Kluwer Academic Publishers
SKU: 9780898382594
Price: 157.47 EUR
Availability: InStock

Автор: Ted Kamins

Език:

Корици: С твърди корици

Издател: Kluwer Academic Publishers

Наличност: Външен склад

Изпращаме след 10-13 дни

157.47 € 307.99 лв

Recent years have seen silicon integrated circuits enter into an increasing number of technical and...

Информация за книгата

Автор

Ted Kamins

Език

Английски език

Корици

Книга - С твърди корици

страници

290

EAN

9780898382594

ISBN

0898382599

Enbook ID

01401085

Издател

Kluwer Academic Publishers

Теглоt

1350

Размери

156 x 234 x 21

Пълно описание

Recent years have seen silicon integrated circuits enter into an increasing number of technical and consumer applications, until they now affect everyday life, as well as technical areas. Polycrystalline silicon has been an important component of silicon technology for nearly two decades, being used first in MOS integrated circuits and now becoming pervasive in bipolar circuits, as well. During this time a great deal of informa tion has been published about polysilicon. A wide range of deposition conditions has been used to form films exhibiting markedly different properties. Seemingly contradictory results can often be explained by considering the details of the structure formed. This monograph is an attempt to synthesize much of the available knowledge about polysilicon. It represents an effort to interrelate the deposition, properties, and applications of polysilicon so that it can be used most effectively to enhance device and integrated-circuit perfor mance. As device performance improves, however, some of the proper ties of polysilicon are beginning to restrict the overall performance of integrated circuits, and the basic limitations of the properties of polysili con also need to be better understood to minimize potential degradation of circuit behavior.

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Polycrystalline Silicon for Integrated Circuit Applications

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Пълно описание

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