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Книга Predictive Simulation of Semiconductor Processing Jarek Dabrowski

Predictive Simulation of Semiconductor Processing

Status and Challenges

Автор: Jarek Dabrowski, Eicke R. Weber
Език: Английски език
Корици: С меки корици
Издател: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Наличност: Външен склад
Изпращаме след 5-8 дни
231.67 € 453.10 лв
Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the s...

Информация за книгата

Автор
Jarek Dabrowski, Eicke R. Weber
Език
Английски език
Корици
Книга - С меки корици
Издадена
2010
страници
490
EAN
9783642058042
ISBN
3642058043
Enbook ID
01651135
Издател
Springer-Verlag Berlin and Heidelberg GmbH & Co. KG
Теглоt
859
Размери
155 x 235 x 28

Пълно описание

Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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