Книга Specialty Gas Analysis - A Practical Guidebook Jeremiah D. Hogan

Specialty Gas Analysis - A Practical Guidebook

Автор: Jeremiah D. Hogan
Език: Английски език
Корици: С твърди корици
Издател: John Wiley & Sons Inc
Наличност: Външен склад
Изпращаме след 10-18 дни
253.69 496.17 лв
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance o...

Информация за книгата

Автор
Език
Английски език
Корици
Книга - С твърди корици
Издадена
1997
страници
200
EAN
9780471185987
ISBN
0471185981
Enbook ID
04888313
Издател
Теглоt
468
Размери
159 x 241 x 19

Пълно описание

The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

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