Tantalum Oxide Thin Films for Embedded Capacitors

Name: Tantalum Oxide Thin Films for Embedded Capacitors
Brand: VDM Verlag Dr. Mueller E.K.
SKU: 9783639096620
Price: 79.66 EUR
Availability: InStock

Using Pulsed DC Reactive Sputtering

Автор: Pushkar Jain

Език:

Корици: С меки корици

Издател: VDM Verlag Dr. Mueller E.K.

Наличност: Външен склад

Изпращаме след 14-21 дни

79.66 € 155.81 лв

Embedded capacitor technology, where thin film §capacitors are integrated at on-chip and/or off-chip...

Информация за книгата

Автор

Pushkar Jain

Език

Английски език

Корици

Книга - С меки корици

Издадена

2008

страници

212

EAN

9783639096620

ISBN

3639096622

Enbook ID

06818705

Издател

VDM Verlag Dr. Mueller E.K.

Теглоt

290

Размери

152 x 229 x 11

Пълно описание

Embedded capacitor technology, where thin film §capacitors are integrated at on-chip and/or off-chip §levels, offers high packaging densities and improved §electrical performance at potentially reduced costs §of capacitor fabrication and integration. This §research explores and establishes the leverages of §using thin film embedded capacitors over currently §used surface mount discrete capacitors. In §particular, this work focuses on developing pulsed §dc reactively sputtered tantalum oxide (Ta2O5) thin §film capacitors for IC chips and packages. A design §space for breakdown voltage and capacitance density §of planar capacitors is established, with film §thickness and material dielectric constant as §parameters. The validity of the developed design §space is experimentally verified with Ta2O5 thin §films over a wide range of film thickness. An §experimentally verified analytical model for pulsed §dc reactive sputtering of Ta2O5 films is described §and evaluated. Various processing and integration §challenges in depositing thin films using reactive §sputtering and their effects on electrical §performance of thin-film capacitors are discussed.

Може също да ви хареса

Клиенти, които купиха тази книга, купиха също

Най-често търсени

Categories

Authors

Publishers

Продукти

Продукти

Най-често търсени

Categories

Authors

Publishers

Продукти

Продукти

Tantalum Oxide Thin Films for Embedded Capacitors

Using Pulsed DC Reactive Sputtering

Информация за книгата

Пълно описание

Може също да ви хареса

Клиенти, които купиха тази книга, купиха също