Crucial Issues in Semiconductor Materials and Processing Technologies

Name: Crucial Issues in Semiconductor Materials and Processing Technologies
Brand: Springer
SKU: 9780792320036
Price: 210.05 EUR
Availability: InStock

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

Автор: S. Coffa, F. Priolo, Emanuele Rimini, J. M. Poate

Език:

Корици: С твърди корици

Издател: Springer

Наличност: Външен склад

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210.05 € 410.81 лв

Semiconductors lie at the heart of some of the most important industries and technologies of the twe...

Информация за книгата

Автор

S. Coffa, F. Priolo, Emanuele Rimini, J. M. Poate

Език

Английски език

Корици

Книга - С твърди корици

Издадена

1992

страници

538

EAN

9780792320036

ISBN

0792320034

Enbook ID

01393899

Издател

Springer

Теглоt

2130

Размери

155 x 235 x 35

Пълно описание

Semiconductors lie at the heart of some of the most important industries and technologies of the twentieth century. The complexity of silicon integrated circuits is increasing considerably because of the continuous dimensional shrinkage to improve efficiency and functionality. This evolution in design rules poses real challenges for the materials scientists and processing engineers. Materials, defects and processing now have to be understood in their totality. World experts discuss, in this volume, the crucial issues facing lithography, ion implication and plasma processing, metallization and insulating layer quality, and crystal growth. Particular emphasis is placed upon silicon, but compound semiconductors and photonic materials are also highlighted. The fundamental concepts of phase stability, interfaces and defects play a key role in understanding these crucial issues. These concepts are reviewed in a crucial fashion.

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Crucial Issues in Semiconductor Materials and Processing Technologies

Proceedings of the NATO Advanced Study Institute on Semiconductor Materials and Processing Technologies Erice, Italy 1-13 July 1991

Информация за книгата

Пълно описание

Може също да ви хареса

Клиенти, които купиха тази книга, купиха също